Lithography is the process of creating a three-dimensional image on the surface of a wafer in which geometric designs are transferred from a two-dimensional mask to a thin layer of ultraviolet-sensitive material. The lithography set of Tose Tajhiz Noyan development and equipment
Company has two pulse and continuous modes, in which pulse exposure is used for lithography with a high height-to-width ratio (3). The two models of liner musk produced include:
1. Manual liner mask: The movement of the sample stage is manually controlled by a micrometre with a movement resolution of 5 micrometres.
2. Alternator motor: The movement of the sample stage and the camera is motorized, and the movement resolution of the stage is 0.2 micrometres.
Our device is designed in a way that it can be easily clean and wash without opening it which may damage sensitive internal elements
Application
Nanoparticle coating / photoresist coating for kit production in biotechnology and MEMS
Technical specifications table
| Technical specifications | LMA-M-11 | LMA-A-11 |
|---|---|---|
| User panel | Character display with simple user keys | "4.3 :HMI |
| Exposure wavelength | 365 nm (Flexible) | 365 nm (Flexible) |
| Exposure area | A circle with a diameter = 11 cm | A circle with a diameter = 11 cm |
| light intensity | 1 - 10 mW/cm^2 | 1 - 10 mW/cm^2 |
| Parallel error of light radiation angle | Less than 1 degree (simulated and optimized optics) | Less than 1 degree (simulated and optimized optics) |
| Exposure modes | Continuous and pulsed exposure with accurate and programmable timing | Continuous and pulsed exposure with accurate and programmable timing |
| The Movement of the alignment module | Motion with micrometre with 5 um resolution for X, Y, Z and amplitude ±15 mm, rotation axis ± 5 ° and accuracy 0.1 ° | Motorized motion with 0.2 resolution and amplitude ± 15 mm, ±15 rotation axis degree and 0.03 degree accuracy |
| Camera movement | Manual movement on axes X,Y | Motorized movement in axes X, Y |
| Camera specifications | 400-40x magnification, HDMI and USB output with axial pliers light to increase image resolution | 400-40x magnification, HDMI and USB output with axial pliers light to increase image resolution |
| features | Dry vacuum pump | Dry vacuum pump |
| Use chuck Vacuum suitable for substrates with different sizes | Use chuck Vacuum suitable for substrates with different sizes |